THE MATERIALS SCIENCE OF THIN FILM

Chapter 6 characterization of thin films

1. Introduction

2. Film thickness

2.1 Introduction

3. Estructural Characterization

3.1 Introduction

4. Chemical Characterization

4.1 Introduction

2.2 Optical methods for measuring

2.2.1 Interferometry of opaque films

FET

FECO

2.2.2 Inteerferomtery of transparente films

VAMFO

CARIS

Step Gauges

Ellipsometry

2.2.3 Mechanical Techniques for measuring film thickness

2.2.3.1 Stylus Method Profilometry

2.2.3.2 Weight Measurement

2.2.3.3 Crystal Oscilators

3.2 Sacanning Electron Microscopy

3.2.4 X - Rays

3.2.3 Electron - Bearn _ Induced (EBIC) Current

3.2.1 Secundary Elctrons

3.2.2 Backscattered Electrons

3.3 Transmission Electron Microscopy

3.4 X-Ray Diffraction

4.3 X- Ray Energy - Dispersive Analysis (EDX)

4.3.1 Equipment

4.3.2 Quantification

4.4 Auger Electron Spectroscopy

4.4.1 Equipment

4.4.2 Quantification

4.5 X - Ray Photoelectral spectroscopy (XPS)

4.6 A couple of applications in GaAs Films

4.6.1 AES

4.6.2 XPS

4.2 Electron Espectroscopy

4.7 Rutherford Buckscattering (RBS)

4.7.4 Spatial and depth resolutions

4.7.5 Quantification

4.7.6 Channeling

4.7.1 Physical Principles

4.7.2 Equipment

4.7.3 Capabilities and Limitations

4.8 Secondary Ion mass Spectrometry (SIMS)

4.9 Applications