Breakdown Maintenance

Resources

Rules of Recovery (Sharepoint-->Home Tab-->Rules)

Ebara BOM (Sharepoint-->Home Right Pane Links)

LK VSPI (In \\mycmp computer)

gCMP Search (Sharepoint-->Search Bar)

Schematics (Sharepoint-->Equipment Tab)

Sensor Cards (Sharepoint-->KnowledgeBase Tab)

ECard (Sharepoint-->KnowledgeBase Tab)

SOP (Sharepoint-->KnowledgeBase Tab)

OPLS(Sharepoint-->KnowledgeBase Tab)

HOWTO (Sharepoint-->KnowledgeBase Tab)

FAR (Sharepoint-->Incidents Tab)

BM Report (Sharepoint-->Incidents Tab)

Guidelines.

01. Get BM Report Notebook

02. Start Timer (Sharepoint-->Incidents Tab-->Template

03. Define the problem.

04. Recover the wafer safely.

05. Document every task

06. Create a BM Cycle Chart-->Upload to Incidents Site

07. Fix the problem

08. Write an FAR-->Upload to Incidents Site

09. Create countermeasures-->SOP/OPLS/HOWTO-->Upload to KnowledgeBase Site

10. Share to the team.