MindMapRA IPS

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Ebara SubsystemsEbara Computer System HMIEbara Computer System NovaEbara Computer System EndpointEbara Devicenet SystemEbara KVM SystemEBara Main Power CabinetEBara PolishingEBara Top Ring ControlEBara DresserEBara Turn TableEBara Load/UnloadEBara Linear TransporterEBara Turn Over 1EBara PusherEBara LifterEBara Transfer RobotEBara Swing TransporterEBara Cleaning Module Main CabinetEBara Turn Over 2EBara Cleaner 1EBara Cleaner 2EBara Cleaner 3EBara Cleaner 4EBara Cleaner Linear Transporter

LK- SubsystemsLK Computer System eServerLK Computer System NovaLK Computer System APCLK DeviceNet SystemLK KVM SystemLK Main Power CabinetLK FI RobotLK Wet RobotLK LCWELK HCLULK CROSSLK Head/UPALK PlatenLK Slurry SystemLK Pad ConditionerLK Facilities (CDA, N2, DIW, Vac)LK Running BeamLK MegasonicsLK Cleaner 1LK Cleaner 2LK IPA DryerLK EFEM

IPS-Inventive Problem Solving WHY? Some problems are easy to solve because we can see them or see the obvious failure point, but some problems are difficult and without a systematic/methodological way of solving the problem, we can end up in a loop of confusion (LOC) and we find ourselves repeating steps that we already travelled. IPS is SASCMP implementation of all sorts of established problem methodology. HOW? 1. Create an IPS Document Template for each Subsystems. 2. Select Top20 Subsystems (problematic) 3. Assign owner of each Top 20 Problematic Subsystems. 4. Create KPIV Template on all subsytems. 5. Created ECARD Template on all subsytems. 6. Create Project List of Subsystems IPS 7. Assign subsystems to owners 8. Coach, guide, follow up owners progress

IPS-Inventive Problem Solving

CONTROL

Spread

Countermeasures

How the fix is maintained?

IMPROVE

Results of Trial Run

Trial Run of Solutions

PDSA-Plan Do Study Act (Solution)

List of possible solutions.

ANALYZE

TRIZ Principle Used

RCA-Root Cause Analysis

Vendor Documents

Related OPLS

Related SOP

ECARD

Sensor Cards

Unit Spec Card

Parts List

Equipment Constants

MCC-Machine Cycle Chart

DeviceNet Diagram

Pneumatic Diagram

Electrical Diagram

System Block Diagrams

KPIV-Key Process Input and Output

Theory of Operation

Subsystem-Title Here

MEASURE

IPS-Inventive Problem Solving

Why? Some problems are easy to solve because we can see them or see the obvious failure points, but some problems are difficult and without a systematic way of solving the problem, we can end up in a loop of confusion (LOC) and we find ourselves repeating steps that we already traveled. IPS is a combination of all sorts of established problem solving methodology that some of our colleagues already invented/implemented.

List of potential causes

What is the current performance?

DEFINE

Action Plan

Boundaries (Project Scope)

Goal Statement

Problem Statement