THE MATERIALS SCIENCE OF THIN FILM

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4.9 Applications

4.8 Secondary Ion mass Spectrometry (SIMS)

4.7 Rutherford Buckscattering (RBS)

4.7.3 Capabilities and Limitations

4.7.2 Equipment

4.7.1 Physical Principles

4.7.6 Channeling

4.7.5 Quantification

4.7.4 Spatial and depth resolutions

4.2 Electron Espectroscopy

4.6 A couple of applications in GaAs Films

4.6.2 XPS

4.6.1 AES

4.5 X - Ray Photoelectral spectroscopy (XPS)

4.4 Auger Electron Spectroscopy

4.4.2 Quantification

4.4.1 Equipment

4.3 X- Ray Energy - Dispersive Analysis (EDX)

4.3.2 Quantification

4.3.1 Equipment

3.4 X-Ray Diffraction

3.3 Transmission Electron Microscopy

3.2 Sacanning Electron Microscopy

3.2.2 Backscattered Electrons

3.2.1 Secundary Elctrons

3.2.3 Electron - Bearn _ Induced (EBIC) Current

3.2.4 X - Rays

2.2.3 Mechanical Techniques for measuring film thickness

2.2.3.3 Crystal Oscilators

2.2.3.2 Weight Measurement

2.2.3.1 Stylus Method Profilometry

2.2.2 Inteerferomtery of transparente films

Ellipsometry

Step Gauges

CARIS

VAMFO

2.2.1 Interferometry of opaque films

FECO

FET

2.2 Optical methods for measuring

4. Chemical Characterization

4.1 Introduction

3. Estructural Characterization

3.1 Introduction

2. Film thickness

2.1 Introduction

1. Introduction

Chapter 6 characterization of thin films

THE MATERIALS SCIENCE OF THIN FILM